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Introductory MEMS: Fabrication and Applications

by Thomas M. Adams,Richard A. Layton

ISBN 13: 9780387095103

Format: Illustrated (462 pages)
Publisher: Springer
Published: 16 Feb 2010

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Introductory MEMS: Fabrication and Applications

by Thomas M. Adams,Richard A. Layton

ISBN 13: 9781489984210

Format: Paperback (460 pages)
Publisher: Springer
Published: 07 Sep 2014

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